文章摘要
刘广桥,董丽梅,李菊生,吴明永,张俊彦.纳米结构碳基薄膜的制备及性能研究[J].润滑与密封,2016,41(2):86-89
纳米结构碳基薄膜的制备及性能研究
  
DOI:10.3969/j.issn.0254-0150.2016.02.017
中文关键词: 纳米结构  碳薄膜  摩擦学  力学
英文关键词: nanostructure  carbon based film  tribology  mechanics
基金项目:甘肃省高等学校科研项目(2013B-070);兰州市科技局项目(41385);兰州城市学院校长科研创新基金项目(LZCU-XZ2014-06);兰州城市学院博士科研启动基金项目(LZCU-BS2013-10);甘肃省自然科学基金项目(145RJZA085).
作者单位E-mail
刘广桥 兰州城市学院 培黎石油工程学院 liuguangll@sina.com 
董丽梅 兰州城市学院 培黎石油工程学院  
李菊生 兰州城市学院 培黎石油工程学院  
吴明永 兰州城市学院 培黎石油工程学院  
张俊彦 兰州城市学院 培黎石油工程学院  
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中文摘要:
      利用单极脉冲等离子体增强化学气相沉积技术在单晶硅衬底上沉积含氢碳薄膜,用高分辨透射电子显微镜和激光拉曼光谱仪研究薄膜的微观结构,用X 射线光电子能谱分析薄膜的化学键状态,并用纳米压痕仪测定薄膜的硬度和弹性模量,在CSM往复式摩擦磨损试验机上考察薄膜的摩擦学性能。结果表明:在单极脉冲等离子体增强化学气相沉积系统上成功制备出在非晶基体上镶嵌弯曲类富勒烯纳米结构的含氢碳薄膜,其独特的类富勒烯纳米结构赋予薄膜良好的力学性能,其弹性恢复系数和硬度分别高达86%和26.37 GPa;与非晶结构薄膜相比,制备的纳米结构含氢碳薄膜在室温环境下摩擦学性能更为优异,在机械摩擦表面具有广阔的应用前景。
英文摘要:
      The hydrogenated carbon films were deposited on Si (100) substrates by an unipolar plasma enhanced chemical vapor deposition technology.High resolution transmission electron microscopy and laser Raman spectroscopy were used to study the microstructure of the as deposited film.X ray photoelectron spectroscope was used to analyze the chemical bonding state of the film.Nanoindentation was used to probe the hardness and elastic modulus and the tribological properties of the film were evaluated on a CSM commercial reciprocating ball on disk tribometer.The results show that the hydrogenated carbon films with nanometer size curved fullerene like structures embedded in the amorphous carbon matrix are successfully fabricated on plasma enhanced chemical vapor deposition system.The better mechanical properties that the elastic recovery coefficient and hardness are as high as 86% and 26.37 GPa,are ascribed as the unique fullerene like nanostructures.Compared with amorphous structure film,the nanostructure film has excellent tribological performance in ambient conditions,which has a broad prospect for industrially application in the mechanical surfaces.
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